Requirements for cleanrooms in the semiconductor industry

The requirements for clean rooms in the semiconductor industry are as follows:
1. High cleanliness requirements
Semiconductor manufacturing requires a very strict clean environment. The air cleanliness in cleanrooms varies depending on the requirements of different semiconductor processes, generally meeting the standards of Class 1 (equal to or less than 1 0.1 micron particle per cubic foot) to Class 100 (equal to or less than 100 0.5 micron particles per cubic foot).
2. Accurate temperature and humidity control
Semiconductor materials are highly sensitive to temperature and humidity. The cleanroom needs to be strictly controlled at 20-25 ° C, with a relative humidity range of 40-60% and fluctuations not exceeding ± 1 ° C and ± 5% RH.
3. Reliable and stable power supply and distribution
The clean room requires a dedicated power supply and distribution system to provide stable and redundant power supply, ensuring the normal and uninterrupted operation of process equipment. At the same time, it is necessary to have protection and filtering functions to prevent power interference.
4. Reasonable flow of dust-free air
Clean rooms need to be equipped with dust-free air filtration and circulation systems to ensure reasonable airflow distribution and no dead corners, so that clean air can fully reach every corner. The airflow speed and air pressure should also be strictly controlled to prevent external air from flowing back or disturbing.
5. Complete seismic design
Considering the stability requirements of semiconductor processes, clean rooms usually need to adopt shock resistant measures to reduce the impact of external vibrations on the process. The foundation should be sufficiently stable and equipped with buffering devices.
6. Material selection is dust-free and pollution-free
The surface material of the clean room must be dust-free and pollution-free, and will not produce particles. Stainless steel, aluminum plates, tempered glass, and other materials are commonly used. An air curtain needs to be installed at the entrance to prevent dust from entering.